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The LaserStation is a newly developed processing system, in order to meet
a broad range of customer needs, with a combination of several types of
lasers developed at CyberLaser and a high-precision 3-D microprocessing
unit. Green/UV lasers, top-of-the-breed femtosecond lasers, infra-red lasers
for biological use are available among others. These lasers are placed
on the same optical base and combined with a 3-D microprocessing unit which
can be used with any of the lasers.
Its advantages are...
1. comparative experiments with different types of lasers can be performed
altogether in a short range of time,
2. advanced microprocessing experiments can be performed with minimal expenses,
3. using in-house developed laser sources, most parameters can be controlled
and customized per request,
4. with optimized stage configuration in the 3-D microprocessing unit,
LaserStation can adapt to various samples without special preparations
or extra cost.
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| Scan stage |
Stroke |
speed |
Movable axes |
Straight-
ness |
| 400mm |
150
mm/s |
3 |
<2µm |
| Observation optics |
CCD |
| Imaging optics |
auto-focus |
| Sample holder |
vacuum chuck |
| Blow system |
nitrogen gas blow with a nuzzle (for the removal of debris) |
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