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| Features |
ALTAIR is world-class high-power CW DUV laser sources resulting from the
following proprietary technologies
①Stable,monolithic sum-frequency mixing(SFM)module
②Eliminating degradation of DUV optics
③Using high-performance nonliniar optical crystal(CLBO) |
| Applications |
・Inspection(Semiconductor wafer,mask,and reticle)
・Write grating into fibers |
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A completely new light source "Altair" can successfuly produce continuous wave laser light in UV to deep UV region. A novel technology of wavelength conversion of Cyber Laser now begins to give high-tech customers a valueable laser source.
Altair will bring innovation onto semiconductor industry and biological industry, for it make possible to inspection and processing of micro-structured materials.
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