■ALTAIR(Specifications) ALTAIR Specifications Product name ALTAIR-266 ALTAIR-X Wavelength 266nm 198.5nm Output Power 200,500mW 100mW Stability ±2% ±3% Beam quality M2<1.3 M2<1.6 Beam size 2.0mm 1.5mm Optical noise <0.5%(RMS) <1.0%(RMS) Laser class Class 4 product * Specifications in this document are subject to change without notice. Outline

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